Inventory and preliminary assessment on availability of commercial solutions for nanoprocesses monitoring

The NanoPAT deliverable “D1.1 – Inventory and preliminary assessment on availability of commercial solutions for nanoprocesses monitoring” is now available to view online. The report is available under the Creative Commons Attribution 4.0 International Licence (CC BY 4.0).

This deliverable, leaded by University of the Basque Country (UPV/EHU), is part of the work package 1 (WP1) – Definition of the nano-monitoring technologies requirements.

This document shows a summary of the most relevant characterization techniques used to measure particle sizes and size distribution. These techniques are classified in three main approaches depending on the particle size distribution (PSD) analysis, which are ensemble, separation and counting methods. Each of the methods explained in the present document are based on different physical principles and present their own advantages and limitations. Only few of the techniques reviewed are valid for online/inline analysis.